Micro and Nano Fabrication
Synopsis
For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes enabling technologies which are necessary for a successful production, i. e. , wafer planarization and bonding, as well as contamination control.
- कॉपीराईट:
- 2015 Springer
Book Details
- Book Quality:
- ISBN-13:
- 9783662443958
- Publisher:
- Springer Berlin Heidelberg, Berlin, Heidelberg
- Date of Addition:
- 2016-12-07T10:24:43Z
- भाषा:
- English
- श्रेणी:
- Usage Restrictions:
- This is a copyrighted book.